Spare parts CMP: calibration tools, spare heads (6 and 8")

- Calibration/maintenance tools used in the fab (first 2 foto’s)
- Motor and motor controllers for bridge / platen / carousel
- Pressure regulators for pad dresser / head / subcarrier pressure
- The full original documentation of Cybec:
- a full box of spares for 6 inch heads
- 6 inch heads
- 8 inch heads
- slip rings
- rotary union