Mainframes - Gasonics L3510 - 150mm Asher

Gasonics L3510 - Asher
Current tool status: Deinstalled, quartz cleaned and stored in separate box, foil wrapped, in warehouse ready to to load for packaging
Vintage: 1995
SN: 97072
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN MES/ERP name: STRIPPER5
Dimensions & weight estimates:
Mainframe dim (cm): 85 x 110 x 155
Mainframe weight (kg): 200

Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


semiconductor BelGaN waferfab fab fab2 mainframe equipment tool