Mainframes - Gasonics L3510 - 150mm Asher

Gasonics L3510 - Asher
Current tool status: Deinstalled, quartz cleaned and stored in separate box, foil wrapped, in warehouse ready to to load for packaging
Vintage: 1995
SN: 97063
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN MES/ERP name: STRIPPER17
Dimensions & weight estimates:
Mainframe dim (cm): 85 x 110 x 155
Mainframe weight (kg): 200