Mainframes - LAM Rainbow 4526I - 150mm Plasma Etch

LAM Rainbow 4526I - Plasma Etch
Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to to load for packaging
Vintage: 1995+/-3j
SN: 3754
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN process: oxidepets
Former BelGaN MES/ERP name: LAM11
Dimensions & weight estimates:
Mainframe dim (cm): 111.8 x 137.2 x 167.5
Mainframe weight (kg): 788
Bypack1 dim (cm): 55.9 x 81.3 x 110.5
Bypack1 weight (kg): 135
Bypack2 dim (cm): 55.9 x 22.9 x 76.2
Bypack2 weight (kg): 54