BelGaN waferfab equipment spares

ATTENTION : END DATE IS POSTPONED TO JANUARY 20TH 15.00h CET !!!

DUE TO DELAY OF ASSIGNMENT MAINFRAIMES AUCTION

BelGaN waferfab equipment spares:
Full spare parts inventory for waferfab mainframes.

Total liquidation of a 5000m² waferfab cleanroom and supporting facilities due to Bankruptcy.
BelGaN fab ran a mix of 150 and 200mm BCD Si and GaN.

The BelGaN Spares have been divided in 116 different lots, based on tool type.
For each lot you can find an xls sheet with a detailed list of spares with OEM part numbers, quantities as listed in our SAP system, and reported prices in our system.
These parts are still stored in their dedicated location in our warehouse.l lt numbers 1-116
It is also mentioned for which tool lotnumbers these spares can be used.

There is a filter available to group the spares. This filter is the same as the one used for the toolset. with some extra fields, e.g. for SIC/Quartz parts.
As some packages would be too large in value, we also have made ca 150 individual packages with the most expensive parts per lot. lot numbers 1001-1201
For these parts, our stores have verified the quantities, made pictures, and packaged the parts in ready to pickup packages.
Also for these spares, it is mentioned for which toolsets they can be used.

Link:
https://qr.scanned.page/uploads/pdf/1733307140790_67502593cf1a8.pdf

Lots (303)

C Spare Parts for Epi ASM Epsilon 2000 One

Numéro de lot 1

Spares can be used for tool lots 52 ,53 ,54 ,55 ,56 ,57 ,58
Number of different Spares : 538
Estimated value of Spares (Eur) : 609462
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 82.946

C Spare Parts for Quartz-SIC PARTS

Numéro de lot 2

Number of different Spares : 137
Estimated value of Spares (Eur) : 614256
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 61.426

C Spare Parts for Metal dep Applied Materials Endura PVD 5500

Numéro de lot 3

Spares can be used for tool lots 5 ,10 ,11 ,12 ,13 ,14 ,15 ,16 ,17 ,18
Number of different Spares : 459
Estimated value of Spares (Eur) : 631558
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 63.156

C Spare Parts for Furnace TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22

Numéro de lot 4

Spares can be used for tool lots 70 ,74 ,75 ,76 ,77 ,78 ,79 ,96 ,102 ,103 ,112 ,113 ,114 ,115 ,116 ,117 ,157 ,158
Number of different Spares : 903
Estimated value of Spares (Eur) : 677500
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 67.750

C Spare Parts for Furnace Thermco THERMCO 8204 - BROOKS (AMAT) Sentinel, ver 2.4

Numéro de lot 5

Spares can be used for tool lots 232 ,251 ,252 ,253 ,254
Number of different Spares : 368
Estimated value of Spares (Eur) : 226210
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 22.621

C Spare Parts for Wet Chemical Process AKRION Gamma Bench

Numéro de lot 6

Spares can be used for tool lots 224 ,225 ,226
Number of different Spares : 111
Estimated value of Spares (Eur) : 205912
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 20.591

C Spare Parts for Track TEL Clean Track Mk Vxx

Numéro de lot 7

Spares can be used for tool lots 98 ,105 ,106 ,107 ,108 ,128 ,129 ,130 ,131 ,132 ,175 ,176 ,177 ,193 ,216
Number of different Spares : 868
Estimated value of Spares (Eur) : 615205
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 61.521

C Spare Parts for Implant Applied Materials 9500XR

Numéro de lot 8

Spares can be used for tool lots 20 ,21
Number of different Spares : 728
Estimated value of Spares (Eur) : 659679
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 65.968

C Spare Parts for Plasma Etch LAM Rainbow TCP 9600

Numéro de lot 9

Spares can be used for tool lots 39 ,40 ,41 ,42 ,43 ,44 ,45 ,46 ,47 ,48
Number of different Spares : 489
Estimated value of Spares (Eur) : 548025
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 55.803

C Spare Parts for I-line Stepper Canon

Numéro de lot 10

Spares can be used for tool lots 3 ,4 ,7 ,8 ,9 ,29 ,30 ,31 ,49 ,50 ,85 ,234 ,235 ,236 ,237 ,238 ,239
Number of different Spares : 450
Estimated value of Spares (Eur) : 392427
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 39.243

C Spare Parts for Plasma Etch LAM Rainbow 4528I

Numéro de lot 11

Spares can be used for tool lots 51 ,61 ,62 ,63 ,64 ,65 ,66 ,67 ,92 ,126
Number of different Spares : 656
Estimated value of Spares (Eur) : 464339
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 97.000

C Spare Parts for Plasma Etch AMAT P5000

Numéro de lot 12

Spares can be used for tool lots 82 ,91 ,97 ,99 ,121 ,122 ,123 ,124 ,125 ,133 ,154 ,155 ,156
Number of different Spares : 897
Estimated value of Spares (Eur) : 457619
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 45.762

C Spare Parts for CMP CYBEQ 8000

Numéro de lot 13

Spares can be used for tool lots 285 ,286 ,287
Number of different Spares : 322
Estimated value of Spares (Eur) : 316904
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 31.690

C Spare Parts for CVD AMAT P5000 CVD

Numéro de lot 14

Spares can be used for tool lots 82 ,91 ,97 ,99 ,121 ,122 ,123 ,124 ,125 ,133 ,154 ,155 ,156
Number of different Spares : 397
Estimated value of Spares (Eur) : 278258
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 28.326

C Spare Parts for Implant Axcelis 6200AV

Numéro de lot 15

Spares can be used for tool lots 86 ,87
Number of different Spares : 543
Estimated value of Spares (Eur) : 332253
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 33.225

C Spare Parts for Plasma Etch AMAT P5200 CENTURA DPS

Numéro de lot 16

Spares can be used for tool lots 22 ,23
Number of different Spares : 335
Estimated value of Spares (Eur) : 246168
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 28.617

C Spare Parts for CVD Watkins Johnson WJ-999R

Numéro de lot 17

Spares can be used for tool lots 68 ,69
Number of different Spares : 445
Estimated value of Spares (Eur) : 261670
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 26.167

C Spare Parts for Wet Chemical Process FSI MERCURY

Numéro de lot 18

Spares can be used for tool lots 95 ,134 ,135 ,136 ,137 ,138 ,139
Number of different Spares : 256
Estimated value of Spares (Eur) : 217585
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 62.500

C Spare Parts for Plasma Etch Tegal 901e

Numéro de lot 19

Spares can be used for tool lots 206 ,207 ,208 ,209 ,210 ,211 ,212 ,213 ,214 ,215
Number of different Spares : 509
Estimated value of Spares (Eur) : 220491
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 22.049

C Spare Parts for Plasma Etch Oerlikon Versaline

Numéro de lot 20

Spares can be used for tool lots 246
Number of different Spares : 155
Estimated value of Spares (Eur) : 76209
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 7.621

C Spare Parts for CVD AMAT P5200 CENTURA HDP

Numéro de lot 21

Spares can be used for tool lots 24 ,25 ,26 ,28
Number of different Spares : 185
Estimated value of Spares (Eur) : 239914
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 85.000

C Spare Parts for Ash Gasonics L3510

Numéro de lot 22

Spares can be used for tool lots 143 ,144 ,145 ,146 ,147 ,148 ,149 ,150 ,151 ,152 ,153 ,185 ,186 ,187 ,188 ,189 ,190
Number of different Spares : 190
Estimated value of Spares (Eur) : 214146
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 21.415

C Spare Parts for Plasma Etch AMAT P5000 POL

Numéro de lot 23

Spares can be used for tool lots 97 ,121 ,122
Number of different Spares : 81
Estimated value of Spares (Eur) : 156584
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 15.658

C Spare Parts for CVD Novellus Concept One

Numéro de lot 24

Spares can be used for tool lots 83 ,84
Number of different Spares : 214
Estimated value of Spares (Eur) : 174035
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 70.000

C Spare Parts for Wet Chemical Process Semitool Solvent Spray Tool

Numéro de lot 25

Spares can be used for tool lots 267 ,268 ,270 ,271
Number of different Spares : 156
Estimated value of Spares (Eur) : 131129
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 30.500

C Spare Parts for Track DNS 80B

Numéro de lot 26

Spares can be used for tool lots 160 ,161
Number of different Spares : 161
Estimated value of Spares (Eur) : 126383
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 12.638

C Spare Parts for Furnace TEL VDF-615S - TEL NGC-M3. ver1.02.0001

Numéro de lot 27

Spares can be used for tool lots 194 ,195 ,196 ,197 ,198 ,199
Number of different Spares : 221
Estimated value of Spares (Eur) : 157054
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 15.705

C Spare Parts for Plasma Etch AMAT P5000 MET

Numéro de lot 28

Spares can be used for tool lots 123 ,124
Number of different Spares : 115
Estimated value of Spares (Eur) : 139625
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 13.963

C Spare Parts for WCVD AMAT P5200 CENTURA

Numéro de lot 29

Spares can be used for tool lots 33 ,34 ,35 ,133
Number of different Spares : 220
Estimated value of Spares (Eur) : 171704
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 17.170

C Spare Parts for Wet Chemical Process LAM Ontrak Synergy

Numéro de lot 30

Spares can be used for tool lots 170 ,171 ,172
Number of different Spares : 364
Estimated value of Spares (Eur) : 152891
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 15.289

C Spare Parts for Plasma Etch LAM Rainbow 4528XL

Numéro de lot 31

Spares can be used for tool lots 60 ,81 ,93
Number of different Spares : 67
Estimated value of Spares (Eur) : 87101
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 8.710

C Spare Parts for Implant Axcelis GDS VHE

Numéro de lot 32

Spares can be used for tool lots 19
Number of different Spares : 244
Estimated value of Spares (Eur) : 121803
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 13.180

C Spare Parts for MFC ANALOG

Numéro de lot 33

Number of different Spares : 48
Estimated value of Spares (Eur) : 110298
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 11.030

C Spare Parts for Wet Chemical Process SEZ Spinetser RST102

Numéro de lot 34

Spares can be used for tool lots 140
Number of different Spares : 70
Estimated value of Spares (Eur) : 54490
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 20.650

C Spare Parts for Implant Varian E220

Numéro de lot 35

Spares can be used for tool lots 59
Number of different Spares : 64
Estimated value of Spares (Eur) : 42986
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 17.599

C Spare Parts for RTP STEAG Heatpulse 8108

Numéro de lot 36

Spares can be used for tool lots 127 ,181 ,182 ,183 ,184
Number of different Spares : 104
Estimated value of Spares (Eur) : 64623
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 6.462

C Spare Parts for PUMPS VANE PUMP

Numéro de lot 37

Number of different Spares : 359
Estimated value of Spares (Eur) : 95126
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 9.513

C Spare Parts for Plasma Etch AMAT P5200 CENTURA DTI

Numéro de lot 38

Spares can be used for tool lots 27 ,32
Number of different Spares : 29
Estimated value of Spares (Eur) : 82753
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 8.275

C Spare Parts for Furnace TEL UL-2604-10 - TEL NGC-M3. ver1.02.0001

Numéro de lot 39

Spares can be used for tool lots 249 ,250
Number of different Spares : 114
Estimated value of Spares (Eur) : 52600
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 5.260

C Spare Parts for Plasma Etch AMAT P5000 SOG

Numéro de lot 40

Spares can be used for tool lots 99
Number of different Spares : 22
Estimated value of Spares (Eur) : 40554
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 4.055

C Spare Parts for MFC DIGITAL

Numéro de lot 41

Number of different Spares : 26
Estimated value of Spares (Eur) : 72552
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 9.455

C Spare Parts for Bake FUSION

Numéro de lot 42

Spares can be used for tool lots 227 ,228
Number of different Spares : 75
Estimated value of Spares (Eur) : 44577
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 4.458

C Spare Parts for Wet Chemical Process DNS 80B

Numéro de lot 43

Spares can be used for tool lots 142 ,163 ,164 ,165
Number of different Spares : 37
Estimated value of Spares (Eur) : 83482
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 8.348

C Spare Parts for MOCVD Aixtron G10+

Numéro de lot 44

Spares can be used for tool lots 6
Number of different Spares : 14
Estimated value of Spares (Eur) : 46633
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 4.663

C Spare Parts for Wafertransfer Metron E.T.2000 MGI WL3

Numéro de lot 45

Spares can be used for tool lots 311 ,312 ,313 ,314 ,315 ,316 ,317 ,318
Number of different Spares : 43
Estimated value of Spares (Eur) : 53333
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 5.333

C Spare Parts for Furnace SVG SVG7000 - BROOKS(AMAT) Sentinel, ver 3.4

Numéro de lot 46

Spares can be used for tool lots 230 ,231 ,232
Number of different Spares : 138
Estimated value of Spares (Eur) : 39658
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 6.566

C Spare Parts for CVD AMAT P5200 CENTURA

Numéro de lot 47

Spares can be used for tool lots 22 ,23 ,24 ,25 ,26 ,27 ,28 ,32 ,33 ,34 ,35
Number of different Spares : 177
Estimated value of Spares (Eur) : 83440
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 8.744

C Spare Parts for Wet Chemical Process Semitool Sirius

Numéro de lot 48

Spares can be used for tool lots 247 ,248
Number of different Spares : 63
Estimated value of Spares (Eur) : 47338
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Offre la plus élevée € 4.734

C Spare Parts for Ash MATRIX

Numéro de lot 49

Spares can be used for tool lots
Number of different Spares : 124
Estimated value of Spares (Eur) : 43752
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 4.375

C Spare Parts for Plasma Etch AMAT P5000 ASP

Numéro de lot 50

Spares can be used for tool lots 82 ,91 ,97 ,99 ,121 ,122 ,123 ,124 ,125 ,133 ,154 ,155 ,156
Number of different Spares : 82
Estimated value of Spares (Eur) : 45199
See also xls sheet for detailed list of spares and quantities per Spare

Enchères clôturées

Enchère de départ € 4.520

BelGaN waferfab equipment spares

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Lots (303)

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