Spare Parts for Plasma Etch AMAT P5000 ASP

Spares can be used for tool lots 82 ,91 ,97 ,99 ,121 ,122 ,123 ,124 ,125 ,133 ,154 ,155 ,156
Number of different Spares : 82
Estimated value of Spares (Eur) : 45199
See also xls sheet for detailed list of spares and quantities per Spare