BelGaN waferfab process mainframes

Numéro d'enchère
3965
Partager cette page:

BelGaN waferfab process mainframes: 
Lithography, CVD, Epitaxy, Implant, Metrology, Plasma etch, Furnace, Wet Chemical Process, WCVD, partsclean 

Total liquidation of a 5000m² waferfab cleanroom and supporting facilities due to Bankruptcy. 
BelGaN fab ran a mix of 150 and 200mm BCD Si and GaN. 
 

Lot overview - List of lots in PDF:
https://res.cloudinary.com/dltpgmjmq/image/upload/q_auto:good/user-media-prod/Mainframes_list_lots_bgkopc
 

Practical information:

to plan a visit : tim@openbare-verkopen.be

for all technical questions about the tools : johan.vercammen@belgan.com

De-installation:

All standard cleaning/decontamination and disconnecting from the fab is at cost of supplier and will be done before end of auction. 
Any costs related to preparing the tool for shipment (locking kit, separating the tool in multiple parts, removing cables between the different parts of the tool, etc), rigging, crating and shipping will be at cost of buyer. Tools are decommissioned by the BelGaN tool technicians, which includes removing and cleaning residual gases and chemicals, and disconnecting the tool from BelGaN Facilities. Openbare Verkopen can provide general technical support for the removal process, such as disconnecting signal cables between different process modules. Please inquire for a quote if needed. Tool-specific actions, like installing transport locking kits, must be done by the buyer.

Preferred partners:

Lifthing: removal ex-factory :

pieterjan@lifthing.com

Deufol : transport to Deufol hub Antwerp, maritime packing, transport to the port, shipping to destination and customs formalities.

deufol.belgium.sales@deufol.com

Please send all general questions about pick up to belgan.pickup@online-auctions.be

Visiting days: 

On appointment between December 2th and January 8th. 

Payment: 

Final due date of payment 50% by Jan 31st , balance by febr 28th. With full payment before pick up !

Pickup: 

Before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment.   

FANC certificate of compliance HC Tools:

There is an obligation to fill in a FANC DOC for lots:
1, 19, 20, 21, 59, 86, 87

Link to doc:
https://qr.scanned.page/uploads/pdf/1733409716731_6751baae7a76d.pdf

End user statement documents:

There is an obligation to sign an end user statement for each tool
 Link to doc:
https://qr.scanned.page/uploads/pdf/1733409198497_6751b9997230b.pdf

 

 

 

Commence le :
30/11/2024 19:00 CET
Se termine à partir de :
09/01/2025 15:00 CET
Tous les jours de visite et de collecte

Précisez votre recherche

                            Lots (292)

                            C LAM Rainbow 4528I - 200mm Plasma Etch
                            Numéro de lot 51
                            C LAM Rainbow 4528I - 200mm Plasma Etch
                            Numéro de lot 51
                            0 offres
                            LAM Rainbow 4528I - Plasma Etch

                            Wafersize: 200mm
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM14

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 55.9 x 22.9 x 76.2
                            Bypack2 weight (kg): 120

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 125.000
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 53
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 53
                            0 offres
                            ASM Epsilon 2000 One - Epitaxy

                            Vintage: 1997+/-3j
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: EPI7

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 110.000
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 54
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 54
                            1 offres
                            ASM Epsilon 2000 One - Epitaxy

                            Vintage: 1999
                            SN: 093020
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: EPI1

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 100.000
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 55
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 55
                            0 offres
                            ASM Epsilon 2000 One - Epitaxy

                            Vintage: 2000
                            SN: 880240
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: EPI2

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 100.000
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 56
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 56
                            1 offres
                            ASM Epsilon 2000 One - Epitaxy

                            Vintage: 2006
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: EPI3

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 100.000
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 57
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 57
                            5 offres
                            ASM Epsilon 2000 One - Epitaxy

                            Vintage: 2007
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: EPI4

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 109.000
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 58
                            C ASM Epsilon 2000 One - 150mm Epitaxy
                            Numéro de lot 58
                            2 offres
                            ASM Epsilon 2000 One - Epitaxy

                            Vintage: 2005+/-2j
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: EPI5

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 101.500
                            C Varian E220 - 150mm Implant
                            Numéro de lot 59
                            C Varian E220 - 150mm Implant
                            Numéro de lot 59
                            35 offres
                            Varian E220 - Implant

                            Vintage: 1992
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: MC3

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 175.000
                            C LAM Rainbow 4528XL - 200mm Plasma Etch
                            Numéro de lot 60
                            C LAM Rainbow 4528XL - 200mm Plasma Etch
                            Numéro de lot 60
                            0 offres
                            LAM Rainbow 4528XL - Plasma Etch

                            Wafersize: 200mm
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM13

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 55.9 x 22.9 x 76.2
                            Bypack2 weight (kg): 120
                            Bypack3 dim (cm): 47.5 x 93 x 126
                            Bypack3 weight (kg): 226.8

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 100.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 61
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 61
                            1 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 1995+/-3j
                            SN: 3104
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM10

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 50 x 22 x 50
                            Bypack2 weight (kg): 50

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 80.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 62
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 62
                            1 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 1995+/-3j
                            SN: 3754
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM11

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 55.9 x 22.9 x 76.2
                            Bypack2 weight (kg): 54

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 80.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 63
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 63
                            1 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 1995+/-3j
                            SN: M3812
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM12

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 55.9 x 22.9 x 76.2
                            Bypack2 weight (kg): 54

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 80.000
                            C LAM Rainbow 4506I - 150mm Plasma Etch
                            Numéro de lot 64
                            C LAM Rainbow 4506I - 150mm Plasma Etch
                            Numéro de lot 64
                            0 offres
                            LAM Rainbow 4506I - Plasma Etch

                            Vintage: 1995+/-3j
                            SN: 2473
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM2

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 55.9 x 22.9 x 76.2
                            Bypack2 weight (kg): 54

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 80.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 65
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 65
                            0 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 1995+/-3j
                            SN: 2873
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM3

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 55.9 x 22.9 x 76.2
                            Bypack2 weight (kg): 54

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 80.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 66
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 66
                            1 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 1995+/-3j
                            SN: 3458
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM4

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 40 x 98 x 81
                            Bypack2 weight (kg): 150

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 80.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 67
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 67
                            1 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 2000+/-3j
                            SN: 2498
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM7

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 80.000
                            C Watkins Johnson WJ-999R - 150mm APCVD
                            Numéro de lot 68
                            C Watkins Johnson WJ-999R - 150mm APCVD
                            Numéro de lot 68
                            14 offres
                            Watkins Johnson WJ-999R - APCVD

                            Vintage: 1992
                            SN: 4817
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: WJ2

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 97.000
                            C KLA uv1280 - 150mm Tickness measurement
                            Numéro de lot 71
                            C KLA uv1280 - 150mm Tickness measurement
                            Numéro de lot 71
                            1 offres
                            KLA uv1280 - Tickness measurement

                            Vintage: 1995+/-5j
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: UV1280

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 152 x 105 x 170
                            Mainframe weight (kg): 1000

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 75.000
                            C KLA uv1280 - 200mm Tickness measurement
                            Numéro de lot 72
                            C KLA uv1280 - 200mm Tickness measurement
                            Numéro de lot 72
                            1 offres
                            KLA uv1280 - Tickness measurement

                            Vintage: 1997+/-2j
                            SN: 970476UV1280SE
                            Wafersize: 200mm
                            Former BelGaN MES/ERP name: UV1281

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 152 x 105 x 170
                            Mainframe weight (kg): 1000

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 75.000
                            C KLA uv1280 - 150mm Tickness measurement
                            Numéro de lot 73
                            C KLA uv1280 - 150mm Tickness measurement
                            Numéro de lot 73
                            1 offres
                            KLA uv1280 - Tickness measurement

                            Vintage: 1999
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: UV1282

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 152 x 105 x 170
                            Mainframe weight (kg): 1000

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 75.000
                            C TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 74
                            C TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 74
                            28 offres
                            TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - Furnace

                            Vintage: 2005
                            SN: M67507
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: C5

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 91 x 400 x 280
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 86.000
                            C TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 75
                            C TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 75
                            10 offres
                            TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - Furnace

                            Vintage: 2007
                            SN: M7X5149
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: DOPE3

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 91 x 400 x 280
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 82.000
                            C TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 76
                            C TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 76
                            20 offres
                            TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - Furnace

                            Vintage: 2006
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: NITRIDE3

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 91 x 400 x 280
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 119.200
                            C TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 77
                            C TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 77
                            18 offres
                            TEL Waves (ALPHA 8SE-D) - TEL Ingenio for Waves, ver 3.22 - Furnace

                            Vintage: 1999
                            SN: M9945039
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: POLY4

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 91 x 380 x 280
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 45 x 60 x 280
                            Bypack1 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 114.200
                            C TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 78
                            C TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 78
                            40 offres
                            TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - Furnace

                            Vintage: 2007
                            SN: M715001
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: TEOS4

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 91 x 400 x 280
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 138.900
                            C TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 79
                            C TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - 150mm Furnace
                            Numéro de lot 79
                            44 offres
                            TEL Waves (ALPHA 8SE-C) - TEL Ingenio for Waves, ver 3.22 - Furnace

                            Vintage: 2000
                            SN: M85421
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: TEOS5

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 91 x 400 x 280
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 120.200
                            C LAM Rainbow 4526XL - 150mm Plasma Etch
                            Numéro de lot 81
                            C LAM Rainbow 4526XL - 150mm Plasma Etch
                            Numéro de lot 81
                            1 offres
                            LAM Rainbow 4526XL - Plasma Etch

                            Vintage: 2000+/-3j
                            SN: 24213
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM5

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 80 x 40 x 130
                            Bypack2 weight (kg): 250
                            Bypack3 dim (cm): 47.5 x 93 x 126
                            Bypack3 weight (kg): 226.8

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 60.000
                            C Applied Materials P5000 - 200mm CVD
                            Numéro de lot 82
                            C Applied Materials P5000 - 200mm CVD
                            Numéro de lot 82
                            1 offres
                            Applied Materials P5000 - CVD

                            Vintage: 1992
                            SN: 5866
                            Wafersize: 200mm
                            Chambers/configuration: 2
                            Former BelGaN process: pecvd, peteos
                            Former BelGaN MES/ERP name: AMAT3

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 130 x 240 x 210
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 50.000
                            C Canon FPA 2000 I1 - 150mm I-line Stepper
                            Numéro de lot 85
                            C Canon FPA 2000 I1 - 150mm I-line Stepper
                            Numéro de lot 85
                            0 offres
                            Canon FPA 2000 I1 - I-line Stepper

                            Vintage: 1992
                            SN: CD50206160-B
                            Wafersize: 150mm
                            Former BelGaN MES/ERP name: STEPPER1

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 190 x 205 x 235
                            Mainframe weight (kg): 2000
                            Bypack1 dim (cm): 66 x 95 x 176
                            Bypack1 weight (kg):
                            Bypack2 dim (cm): 85 x 85 x 200
                            Bypack2 weight (kg):
                            Bypack3 dim (cm): 85 x 51 x 200
                            Bypack3 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 50.000
                            C Axcelis 6200AV - 150mm Implant
                            Numéro de lot 86
                            C Axcelis 6200AV - 150mm Implant
                            Numéro de lot 86
                            46 offres
                            Axcelis 6200AV - Implant

                            Vintage: 1992
                            SN: IMP730
                            Wafersize: 150mm
                            Former BelGaN MES/ERP name: MC

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 121.500
                            C Axcelis 6200AV - 150mm Implant
                            Numéro de lot 87
                            C Axcelis 6200AV - 150mm Implant
                            Numéro de lot 87
                            47 offres
                            Axcelis 6200AV - Implant

                            Vintage: 1993
                            SN: IMP789
                            Wafersize: 150mm
                            Former BelGaN MES/ERP name: MC2

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 107.500
                            C Biorad QS 2200 M - 150mm Boron and phospor dopant measurement
                            Numéro de lot 88
                            C Biorad QS 2200 M - 150mm Boron and phospor dopant measurement
                            Numéro de lot 88
                            0 offres
                            Biorad QS 2200 M - Boron and phospor dopant measurement

                            Vintage: 1998
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: BIORAD

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 121 x 108 x 118
                            Mainframe weight (kg): 1000

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 50.000
                            C Biorad QS 2200 M - 150mm Boron and phospor dopant measurement
                            Numéro de lot 89
                            C Biorad QS 2200 M - 150mm Boron and phospor dopant measurement
                            Numéro de lot 89
                            0 offres
                            Biorad QS 2200 M - Boron and phospor dopant measurement

                            Vintage: 1999
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: BIORAD2

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 122 x 105 x 118
                            Mainframe weight (kg): 1000

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 50.000
                            C Hitachi Hitatchi S 7840 - 150mm CD measurement
                            Numéro de lot 90
                            C Hitachi Hitatchi S 7840 - 150mm CD measurement
                            Numéro de lot 90
                            4 offres
                            Hitachi Hitatchi S 7840 - CD measurement

                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: SEM7

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 130 x 170 x 190
                            Mainframe weight (kg): 2000
                            Bypack1 dim (cm): 60 x 140 x 196
                            Bypack1 weight (kg): 340
                            Bypack2 dim (cm): 54 x 90 x 180
                            Bypack2 weight (kg): 380
                            Bypack3 dim (cm): 40 x 76 x 81
                            Bypack3 weight (kg): 80

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 53.000
                            C Applied Materials P5000 - 200mm Plasma Etch
                            Numéro de lot 91
                            C Applied Materials P5000 - 200mm Plasma Etch
                            Numéro de lot 91
                            32 offres
                            Applied Materials P5000 - Plasma Etch

                            Vintage: 1995
                            SN: 6854
                            Wafersize: 200mm
                            Chambers/configuration: 2 etch
                            Former BelGaN process: taperpets
                            Former BelGaN MES/ERP name: AMAT5

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 85.000
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 92
                            C LAM Rainbow 4526I - 150mm Plasma Etch
                            Numéro de lot 92
                            1 offres
                            LAM Rainbow 4526I - Plasma Etch

                            Vintage: 2000+/-3j
                            SN: 2481
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM6

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 40 x 98 x 81
                            Bypack2 weight (kg): 150

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 50.000
                            C LAM Rainbow 4526XL - 150mm Plasma Etch
                            Numéro de lot 93
                            C LAM Rainbow 4526XL - 150mm Plasma Etch
                            Numéro de lot 93
                            0 offres
                            LAM Rainbow 4526XL - Plasma Etch

                            Vintage: 2000+/-3j
                            SN: 2986
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: oxidepets
                            Former BelGaN MES/ERP name: LAM9

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 111.8 x 137.2 x 167.5
                            Mainframe weight (kg): 788
                            Bypack1 dim (cm): 55.9 x 81.3 x 110.5
                            Bypack1 weight (kg): 135
                            Bypack2 dim (cm): 50 x 22 x 50
                            Bypack2 weight (kg): 50
                            Bypack3 dim (cm): 47.5 x 93 x 126
                            Bypack3 weight (kg): 226.8

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 50.000
                            C Innolas S-2000 - UV - 200mm Wafermarking
                            Numéro de lot 94
                            C Innolas S-2000 - UV - 200mm Wafermarking
                            Numéro de lot 94
                            38 offres
                            Innolas S-2000 - UV - Wafermarking

                            Vintage: 2024
                            Wafersize: 200mm
                            Former BelGaN MES/ERP name: WAFERMARK2

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 112.000
                            C TEL ALPHA 8S-CVN - TEL NGC-T4. ver1.65.0001 - 150mm Furnace
                            Numéro de lot 96
                            C TEL ALPHA 8S-CVN - TEL NGC-T4. ver1.65.0001 - 150mm Furnace
                            Numéro de lot 96
                            8 offres
                            TEL ALPHA 8S-CVN - TEL NGC-T4. ver1.65.0001 - Furnace

                            Vintage: 2000
                            SN: A45099
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: POLY3

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 43.500
                            C Applied Materials P5000 - 150mm Plasma Etch
                            Numéro de lot 97
                            C Applied Materials P5000 - 150mm Plasma Etch
                            Numéro de lot 97
                            0 offres
                            Applied Materials P5000 - Plasma Etch

                            Vintage: 1992
                            SN: 6379
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Chambers/configuration: 2 etch
                            Former BelGaN process: polypets
                            Former BelGaN MES/ERP name: AMAT1

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 135 x 195 x 190
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 37.500
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 98
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 98
                            1 offres
                            TEL Clean Track Mk VIII, WEE - Track

                            Vintage: 1997
                            SN: MD8271055
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: COAT/DEVELOP9

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 380 x 150 x 282
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 100 x 70 x 150
                            Bypack1 weight (kg):
                            Bypack2 dim (cm): 90 x 65 x 150
                            Bypack2 weight (kg):
                            Bypack3 dim (cm): 200 x 65 x 150
                            Bypack3 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 35.000
                            C Applied Materials P5000 - 150mm Plasma Etch
                            Numéro de lot 99
                            C Applied Materials P5000 - 150mm Plasma Etch
                            Numéro de lot 99
                            0 offres
                            Applied Materials P5000 - Plasma Etch

                            Vintage: 1995
                            SN: 4591
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN process: sogpets
                            Former BelGaN MES/ERP name: AMAT7

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 135 x 195 x 195
                            Mainframe weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 32.500
                            C TEL Clean Track MVIII - 150mm Coater
                            Numéro de lot 100
                            C TEL Clean Track MVIII - 150mm Coater
                            Numéro de lot 100
                            1 offres
                            TEL Clean Track MVIII - Coater

                            Vintage: 2000
                            SN: MD8102063
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Chambers/configuration: 3 coat cups
                            Former BelGaN process: picoat, barcoat, sogcoat
                            Former BelGaN MES/ERP name: PICOAT2

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 251 x 136 x 230
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 35 x 40 x 82
                            Bypack1 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 30.000
                            C TEL Clean Track MVIII - 150mm Coater
                            Numéro de lot 101
                            C TEL Clean Track MVIII - 150mm Coater
                            Numéro de lot 101
                            1 offres
                            TEL Clean Track MVIII - Coater

                            Vintage: 2011
                            SN: 815504
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Chambers/configuration: 1 coat cup, 1 develop cup
                            Former BelGaN process: picoat
                            Former BelGaN MES/ERP name: PICOAT3

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 180 x 150 x 235
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 90 x 65 x 182
                            Bypack1 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 30.000
                            C TEL ALPHA 658SD - TEL NGC-T4. ver1.65.0001 - 150mm Furnace
                            Numéro de lot 102
                            C TEL ALPHA 658SD - TEL NGC-T4. ver1.65.0001 - 150mm Furnace
                            Numéro de lot 102
                            0 offres
                            TEL ALPHA 658SD - TEL NGC-T4. ver1.65.0001 - Furnace

                            Vintage: 1995
                            SN: A9570126
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: C1

                            Dimensions & weight estimates:not yet available

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Enchère de départ € 30.000
                            C SDI FAaST 230-DP-SPV - 150mm SPV measurement
                            Numéro de lot 104
                            C SDI FAaST 230-DP-SPV - 150mm SPV measurement
                            Numéro de lot 104
                            1 offres
                            SDI FAaST 230-DP-SPV - SPV measurement

                            Vintage: 1999
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: SPV2

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 150 x 136 x 100
                            Mainframe weight (kg): 500

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 30.000
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 105
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 105
                            1 offres
                            TEL Clean Track Mk VIII, WEE - Track

                            Vintage: 1997
                            SN: 8271114
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: COAT/DEVELOP16

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 465 x 145 x 230
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 70 x 61 x 150
                            Bypack1 weight (kg):
                            Bypack3 dim (cm): 44 x 82 x 100
                            Bypack3 weight (kg):
                            Bypack4 dim (cm): 44 x 82 x 100
                            Bypack4 weight (kg):
                            Bypack5 dim (cm): 70 x 70 x 160
                            Bypack5 weight (kg):
                            Bypack6 dim (cm): 70 x 60 x 175
                            Bypack6 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 30.000
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 106
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 106
                            7 offres
                            TEL Clean Track Mk VIII, WEE - Track

                            Vintage: 1998
                            SN: MD8281546
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: COAT/DEVELOP17

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 465 x 145 x 230
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 70 x 61 x 150
                            Bypack1 weight (kg):
                            Bypack2 dim (cm): 160 x 75 x 150
                            Bypack2 weight (kg):
                            Bypack3 dim (cm): 44 x 82 x 100
                            Bypack3 weight (kg):
                            Bypack4 dim (cm): 44 x 82 x 100
                            Bypack4 weight (kg):
                            Bypack5 dim (cm): 70 x 70 x 160
                            Bypack5 weight (kg):
                            Bypack6 dim (cm): 70 x 60 x 175
                            Bypack6 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 60.000
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 107
                            C TEL Clean Track Mk VIII, WEE - 150mm Track
                            Numéro de lot 107
                            2 offres
                            TEL Clean Track Mk VIII, WEE - Track

                            Vintage: 1997
                            SN: MD8271054
                            Wafersize: 150mm
                            200mm convertible: Yes
                            Former BelGaN MES/ERP name: COAT/DEVELOP18

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 465 x 145 x 230
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 141 x 81 x 181
                            Bypack1 weight (kg):
                            Bypack2 dim (cm): 160 x 75 x 150
                            Bypack2 weight (kg):
                            Bypack3 dim (cm): 44 x 82 x 100
                            Bypack3 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 30.500
                            C TEL Clean Track Mk VII - 200mm Track
                            Numéro de lot 108
                            C TEL Clean Track Mk VII - 200mm Track
                            Numéro de lot 108
                            2 offres
                            TEL Clean Track Mk VII - Track

                            Vintage: 1996
                            SN: MD716900
                            Wafersize: 200mm
                            Former BelGaN MES/ERP name: COAT/DEVELOP8

                            Dimensions & weight estimates:
                            Mainframe dim (cm): 345 x 140 x 182
                            Mainframe weight (kg):
                            Bypack1 dim (cm): 70 x 95 x 160
                            Bypack1 weight (kg):
                            Bypack2 dim (cm): 140 x 60 x 150
                            Bypack2 weight (kg):
                            Bypack3 dim (cm): 90 x 60 x 150
                            Bypack3 weight (kg):

                            Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


                            semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
                            Enchères clôturées
                            Offre la plus élevée € 30.500