Spare Parts for I-line Stepper Canon

Spares can be used for tool lots 3 ,4 ,7 ,8 ,9 ,29 ,30 ,31 ,49 ,50 ,85 ,234 ,235 ,236 ,237 ,238 ,239
Number of different Spares : 450
Estimated value of Spares (Eur) : 392427
See also xls sheet for detailed list of spares and quantities per Spare